磁六极球差校正系统的计算与分析

计算物理 ›› 1997, Vol. 14 ›› Issue (S1): 485-486.

磁六极球差校正系统的计算与分析

周庆, 陈尔纲, 胡宗高

云南大学物理系, 昆明 650091

收稿日期:1997-03-04 修回日期:1997-04-29 出版日期:1997-12-25 发布日期:1997-12-25

COMPUTATION AND ANALYSIS OF A MAGNETIC SEXTUPOLE SYSTEM FOR CORRECTION OF SPHERICAL ABERRATION

Zhou Qing, Chen Ergang, Hu Zonggao

Department of Physics Yunnan University, Kunming 650091

Received:1997-03-04 Revised:1997-04-29 Online:1997-12-25 Published:1997-12-25

摘要/Abstract

摘要： 限制电子显微镜分辨本领的主要因素是电子透镜的球差,对一种实际的校正磁透镜的磁六极球差校正系统进行了计算和分析。计算结果表明利用该系统可以消除三级球差。

关键词: 球差校正器, 磁六极系统, 电子显微镜

Abstract: The spherical aberration of electron lens is always the principal factor which limits the resolution of electron microscope.An analysis and computation of magretic sextupole corrector to correct spherical aberration in a round lens is presented.The numerical results show that resolution of electron microscope can be improved by using the present system.

Key words: spherical aberration corrector, magnetic sextupole system, electron microscope

中图分类号:

周庆, 陈尔纲, 胡宗高. 磁六极球差校正系统的计算与分析[J]. 计算物理, 1997, 14(S1): 485-486.

Zhou Qing, Chen Ergang, Hu Zonggao. COMPUTATION AND ANALYSIS OF A MAGNETIC SEXTUPOLE SYSTEM FOR CORRECTION OF SPHERICAL ABERRATION[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1997, 14(S1): 485-486.

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