关键词: 气-固相互作用, 分子动力论方法, 吸附几率, 脱附速率

Abstract: The molecular dynamics method is employed to study the sticking and desorption of Xenon atoms from a platinum surface.After constructing correct gas-surface interaction potential,the stochastic classic trajectory method is adopted to solve the motion equation of both gas and solid atoms,then the trajectory and behavior of gas atoms can be obtained.The results show that the sticking probability depends on such factors as wall temperature,gas atom incident enenrgy and interaction potential parameters etc.,the thermal desorption rate of gas atoms from platinum surface satisfies Arrhenius correlation.

Key words: gas-surface interaction, molecular dynamic method, sticking probability, desorption rate