利用Monte Carlo法计算粒子传输中的空间电荷效应

计算物理 ›› 1997, Vol. 14 ›› Issue (6): 787-795.

利用Monte Carlo法计算粒子传输中的空间电荷效应

雷威, 尹涵春

东南大学电子工程系, 南京 210096

收稿日期:1996-08-01 修回日期:1997-01-27 出版日期:1997-11-25 发布日期:1997-11-25

SIMULATION OF DISCRETE SPACE CHARGE EFFECT WITH MONTE CARLO METHOD IN THE TRANSPORTATION OF ELECTRON AND ION BEAM

Lei Wei, Yin Hanchun

Department of Electronic Engineering, Southeast University, Nanjing 210096

Received:1996-08-01 Revised:1997-01-27 Online:1997-11-25 Published:1997-11-25

摘要/Abstract

摘要： 在电子束印刷(electron-beam lithography)、聚焦离子束(focus ion beam)以及阴极射线管(cathode ray tube)等电子及离子束器件中,束中各粒子之间存在相互作用,产生空间电荷效应。人们对电子及离子束器件中的空间电荷效应已经做了大量的研究。到目前为止,通常采用Monte Carlo法计算粒子输运过程中的离散的空间电荷效应。在此主要研究在束形成区利用Monte Carlo法计算空间电荷效应,并讨论在计算过程中出现的边缘效应,在此基础上提出一些新的处理方法以减小边缘效应,提高计算效率。

关键词: Monte Carlo法, 束成形区, 边缘效应, 计算效率

Abstract: In electron beam lithography system,focus ion beam system and cathode ray tubes,the space charge effect caused by the interaction of every particle affects the quality of the device.A lot of scholars have already studied the space charge effect.As so far,Monte Carlo method is often used to calculate the space charge effect in the transportation of particles.This paper tries to use Monte Carlo method to calculate the space charge effect in the beam form region.The 'edge effect' is analysed and some new ways are proposed to decrease the'edge effect' in the simulation.

Key words: Monte Carlo method, beam form region, edge effect, effeciency of calculation

中图分类号:

O46
O242.11

雷威, 尹涵春. 利用Monte Carlo法计算粒子传输中的空间电荷效应[J]. 计算物理, 1997, 14(6): 787-795.

Lei Wei, Yin Hanchun. SIMULATION OF DISCRETE SPACE CHARGE EFFECT WITH MONTE CARLO METHOD IN THE TRANSPORTATION OF ELECTRON AND ION BEAM[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1997, 14(6): 787-795.

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