计算物理 ›› 1987, Vol. 4 ›› Issue (1): 17-22.
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王德明1, 张彦明2
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Wang De-ming1, Chang Yan-ming2
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摘要： 对半导体工艺中常碰到的一类相变导热问题提出了一种用特殊函数作为基本解的边界元方法。在数值处理中运用高斯型数值积分结合Bessel函数的渐近展开式有效地解决了特殊函数的积分运算。计算结果表明,与传统的有限无法相比,本方法具有耗时少,精度高的优点。本方法很容易推广到三维情况。
Abstract: A BEM with special function as the fundamental solution was proposed to solve phase change heat conduction problems encontered in the process of semiconductor technology. By applying the Gauss integration formulas and asymptotic expansion of Bessel function, the integrations of special function, were carried out effectively.Results show that, compared with the conventional FEM, the developed method Possesses the merits of less computation time and higher accuracy. The method can be extended to three dimensional case with no difficulty.
王德明, 张彦明. 边界元法解相变导热问题[J]. 计算物理, 1987, 4(1): 17-22.
Wang De-ming, Chang Yan-ming. SOLUTION OF PHASE CHANGE HEAT CONDUCTION PROBLEMS BY BEM WITH SPECIAL FUNCTION AS THE FUNDAMENTAL SOLUTION[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1987, 4(1): 17-22.
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