表面凹陷对等离子体浸没离子注入均匀性的影响

曾照明, 汤宝寅, 王松雁, 田修波, 刘爱国, 王小峰, 朱箭豪

INFLUENCE OF SURFACE TRENCH ON UNIFORMITY OF PLASMA IMMERSION ION IMPLANTATION

ZENG Zhao-ming, TANG Bao-yin, WANG Song-yan, TIAN Xiu-bo, LIU Ai-guo, WANG Xiao-feng, CHU Paul K