硅中硼离子注入的带电缺陷动力学模拟
李鹏迪, 刘俊, 郑淇蓉, 张传国, 李永钢, 张永胜, 赵高峰, 曾雉
Dynamics Modeling of Charged Defects in Si under B Ion Implantation
Pengdi LI, Jun LIU, Qirong ZHENG, Chuanguo ZHANG, Yonggang LI, Yongsheng ZHANG, Gaofeng ZHAO, Zhi ZENG
计算物理
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2021, (3): 361
-370
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DOI: 10.19596/j.cnki.1001-246x.8245
