晶体相场法研究金属微互连结构形变过程对界面Kirkendall空洞生长的抑制机理
马文婧, 王进, 郭慧, 吕美妮, 张宏泽, 李冬德
Phase Field Crystal Method Study on Inhibitory Mechanism of the Growth of Kirkendall Voids During Deformation Process at the Interface of Metal Micro Interconnect Structures
Wenjing MA, Jin WANG, Hui GUO, Meini LYU, Hongze ZHANG, Dongde LI
计算物理
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2023, (4): 416
-424
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DOI: 10.19596/j.cnki.1001-246x.8618
