低气压容性耦合Ar/CH4等离子体的放电特性
殷桂琴, 姜永博, 黄禹田
Discharge Characteristics of Low Pressure Capacitively Coupled Ar/CH4 Plasma
Guiqin YIN, Yongbo JIANG, Yutian HUANG
计算物理 . 2024, (4): 472 -479 .  DOI: 10.19596/j.cnki.1001-246x.8734