Abstract: A silicon micro actuator model with large-displacement and low-voltage is presented based on principle of verticalhorizontal bending. Dynamic equation of micro actuator with axial and transverse loading is built based on Lagrange-Maxwell electromechanical analysis dynamics. Influence of temperature stress,axial electrostatic force and squeezing force are analyzed. Transverse distributed load and axial load are transformed equivalently into transverse centralized load with Runge-Kutta algorithm and finite difference method respectively. Relationships of deformation with driving voltage,regulation voltage,and axial compression quantity and temperature difference are simulated. It shows that displacement is as large as 10. 861 μm as driving voltage is only 16 V. Displacement is much greater than that of existing micro actuators. Simulation results are verified by experiments.

Key words: MEMS, micro actuator, vertical-horizontalbending, Lagrange-Maxwell equation of electromechanical dynamics