Abstract: Selection of function family and algorithm to fit optical interference wave surface, system aberration and methods to classify the type of surface shape in analysis of plane error with Zernike polynomials are researched in depth. A new theory and method is put out with an error theory to appraise precision of the system objectively to inspect surfaces of the optical plane glass with laser quantizing technique.

Key words: quantizing interference wave surface, error analysis, Zernike polynomials fitting, precision appraising