SPUTTERING YIELD CALCULATION BY MONTE CARLO SIMULATION WITH SCREENING LENGTH OF SHELL EFFECTS

CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 2002, Vol. 19 ›› Issue (4): 290-292.

Previous Articles Next Articles

SPUTTERING YIELD CALCULATION BY MONTE CARLO SIMULATION WITH SCREENING LENGTH OF SHELL EFFECTS

LI Zhi-jie¹, WANG Ze-hui¹, Takaichi Kawamura², Yasunori Yamamura²

1. Inner Mongolian University for Nationality, Tongliaoshi 028043, China;
2. Okayama Univeristy of Science, Okayama 700-0005, Japan

Received:2001-01-03 Revised:2001-04-28 Online:2002-07-25 Published:2002-07-25

Abstract

Abstract: The sputtering yields due to various ion impacts on monatomic materials are calculated with the ACAT code.As the interatomic potential,Moliére potential is used in the simulation,and the theoretical screenging length is adopted which was advanced by Yamamura to include shell effects.The calculation results are consistent with experiment data and Yamamura's empirical sputtering formula.

Key words: Monte Carlo simulation, sputtering yield, screening length with shell effects, interatomic potential

CLC Number:

O562.4

LI Zhi-jie, WANG Ze-hui, Takaichi Kawamura, Yasunori Yamamura. SPUTTERING YIELD CALCULATION BY MONTE CARLO SIMULATION WITH SCREENING LENGTH OF SHELL EFFECTS[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2002, 19(4): 290-292.

[1]	WU Yan, LIU Siqi, LI Shengqiang. Electrostatic Trap and Microtrap Arrays for Cold Polar Molecules on a Chip Surface [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2019, 36(4): 483-490.
[2]	ZHU Jianyu, HUANG Meng. Numerical Simulation of Fission Neutron Angular Correlation Distributions [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2018, 35(4): 429-436.
[3]	LI Shengqiang. A Controllable Electrostatic Well for Cold Polar Molecules in Weak Field Seeking State on a Chip [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2017, 34(6): 731-739.
[4]	FU Yuanguang, ZHENG Jianhua, SHANGGUAN Danhua, LI Rui, LI Gang, MA Yan, DENG Li. Design and Realization of Mesh Tally in General Monte Carlo Particle Transport Code JMCT [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2016, 33(5): 581-586.
[5]	LONG Guangbo, ZHENG Yonggang, OU Jianwen, WANG Xinghua, HUANG Xia, WANG Yanfang. Monte Carlo Simulation for Inverse Compton Scattering [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2016, 33(2): 136-146.
[6]	ZHANG Yanjun, WANG Chao, YE Wenjiang, ZHANG Zhidong. Monte Carlo Simulation of Nematic Droplets with Modified Gruhn-Hess Pair Potential [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2013, 30(2): 244-250.
[7]	YAN Chao. Molecular Dynamics Simulation of Energetic Deposition on Pt(111) Surface with Oblique Ni Atom Bombardment [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2011, 28(5): 767-772.
[8]	TAN Zhenyu, ZHANG Liming, GAO Hongxia. Elastic Scattering of Low-energy Electrons in Liquid Water [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2010, 27(6): 811-815.
[9]	ZHOU Xuan, ZHANG Zhidong. Nematic Liquid Crystal Cell with Bend Distortions Based on Modified Gruhn-Hess Pair Potential [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2010, 27(4): 598-602.
[10]	FENG Liya, XIN Zihua, WANG Wutao. Magnetic Properties of One-dimensional Antiferromagnetic Ising Diamond Chain [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2010, 27(4): 613-618.
[11]	LIU Zhiliang, MAO Yongze. Monte Carlo Simulation on Equivalent of Nuclear Explosion Using X-ray Imaging [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2010, 27(1): 15-22.
[12]	LIN Zhiqin, YE Qingying, ZHONG Kehua, HUANG Zhigao. Magnetic Properties and Controllable Vortex Circulation of Asymmetric Co Nanorings:Monte Carlo Simulation [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2010, 27(1): 143-149.
[13]	XU Xiaojun, WANG Fengfei. Monte Carlo Simulation of Cluster Growth at Different Temperatures [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2009, 26(5): 758-762.
[14]	ZHUO Jun, NIU Shengli, HUANG Liuxing, ZHU Jinhui. Detailed Monte Carlo Simulation of Low Energy Electron Backscattering from Solids [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2009, 26(4): 586-590.
[15]	CAI Shuhui, CHEN Qiaolong, CAI Congbo. Monte Carlo Simulation of Liquid Self-diffusion with Surface Relaxation [J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2009, 26(1): 42-48.

SPUTTERING YIELD CALCULATION BY MONTE CARLO SIMULATION WITH SCREENING LENGTH OF SHELL EFFECTS

PDF

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Authors

Reviewers

Journal Online

About Journal