Abstract: Using Monte Carlo method, both emission and spatial distributions of the backscattered electrons (BSEs) of the solids Al,Cu,Ag,Au under the action of low energy electrons with energy E₀ ≤ 5keV keV have been simulated and calculated. Mott cross section and the modified Bethe equation are used to describe the elastic and inelastic scattering of electrons in solids, respectively. The energy distribution, surface spatial distribution, depth distributioin in solids and angle distribution of BSEs have been obtained. The dependence of angle distribution of BSEs on the energy distribution, surface spatial distribution and depth distribution of BSEs are also calculated, describing the distribution regularity and emission of BSEs systematically.

Key words: Monte Carlo method, low-energy electron scattering, spatial distribution, backscattered electron