Abstract: A 2-D boundary element method is introduced for the simulation of high-voltage Junction termination.With the concept of critical electric field,this method does not need to perform ionization integral.The effect of interface charge to the breakdown voltage of FP-JTE junction termination has been analyzed.The result shows that the breakdown voltage almost linearly depends on the density of interface charge,and the field plate can suppress the breakdown voltage sensitivity to interface charge.

Key words: Boundary Element Method, field plate, planar junction termination, junction termination extension