Abstract: In this paper, electron movement in the cathode fall region of a glow discharge in Argon has been simulated using the three dimensional Monte Carlo method, which has taken advantage of a null-collision technique. The electron distribution functions and the macroscopic electron parameters including the mean electron energy, the mutiplication coefficient and the Townsend inoizion coefficient are given and compared with those obtained with the one dimensional computer model. The results have shown that the angular scattering has significantly affected the electron behavour.

Key words: glow discharge, null-collision technique, Monte Carlo simulation