CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 1992, Vol. 9 ›› Issue (3): 263-266.

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RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF* EXCIMER SYSTEM PUMPED BY PROTON-BEAM

Wang Xiaosha, Chen Dongquan, Wang Zhengyan   

  1. Institute of Applied Physics and Computational Mathematics, P. O. Box 8009, Beijing, 100088, China
  • Received:1991-07-11 Revised:1992-03-19 Online:1992-09-25 Published:1992-09-25

Abstract: The computational program of chemical kinetics of KrF* excimer laser pumped by e-beam is modified. The kinetics and energy deposition for the mixture system of Ar, Kr and F2 pumped by proton-beam is calculated. The results show that deposited energy is about 50 times as much as by e-beam-pumping for the same pressure, the same mixture of the gases and the same current density.

Key words: KrF* excimer laser, proton-beam-pumping, energy deposition