CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 1990, Vol. 7 ›› Issue (4): 448-452.

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ELECTRON ENERGY DISTRIBUTIONS OF DIRECT-CURRENT ARGON DISCHARGES AT LOW PRESSURES

Wang Dezhen, Liu Yue, Ma Tengcai   

  1. The Key National Laboratory of Material Modification byBeam Three, Dalian University of Technology
  • Received:1990-04-22 Online:1990-12-25 Published:1990-12-25

Abstract: Electron energy distributions of direct-curent argon discharges at low pressures were calculated by numerically solving the homogeneous Baltzmann equation. The calculations cover the whole range of low electron densities to sufficiently high electron densities. Typical values of the ratios of the electric field to the gas density in this work are in the renges of 10-16 < E/N < 10-15 Vcm2. The influence of electron-electron collisions and the electric field on the electron energy distribution function was studied.

Key words: direct-current argon discharge, electron energy distribution, baltzmann equation