Abstract: A compressible lattice-Boltzmann model coupled with non-equilibrium extrapolation method are adopted to simulate gas flow in microchannels at slip regime (Kn≤0.1).Numerical results,including velocity profiles at outlet,pressure distributions and mass flowrates,agree well with analytical solutions and experimental results.In addition,gas flow in a 180 degree curved channel is numerically simulated.It shows that boundary layer separation is suppressed by slip velocity at the wall.In addition,mass flowrate of a curved channel is smaller than that of a straight one.

Key words: microfluids, lattice Boltzmann method, Knudsen number, cureved channel