Abstract: Monte Carlo simulation on electron transport in nitrogen glow discharge between drilled electrodes in a plasma ion source is presented.Collision probabilities of electron-molecule,average energy and exit angle of outgoing electrons are calculated.Energy distribution of electron calculated follows approximately Boltzmann distribution.With increasment of E/N,electron average energy and probabilities of electric excitation,dissociation,ionization,dissociative ionization collisions are increased.Nonuniform electric field between electrodes enhances ionization rate and electron average energy obviously.

Key words: nitrogen plasma, Monte Carlo simulation, electrons transport behavior