A fast simulation annealing (SA) algorithm for the design of diffractive optical elements (DOE) for uniform illumination is presented.The Tsallis statistic and corresponding utility function are introduced into a hybrid algorithm in which the self-iterative and SA algorithms are combined to enhance the efficiency.Compared with traditional SA algorithm,simulated results show that it saves 99% of time to converge the incident energy into a desired region with the same mean square error (MSE).

A hybrid method which collects the advantages of both iterative method and optimization method is introduced.This method is adopted in designing the diffractive optical device used in target illumination of ICF system,and better design results are obtained.The diffractive efficiency is up to 97.5%,the mean square error is 0.026 and the focal plane profile has an perfectly flat top.