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COMPUTATION AND ANALYSIS OF A MAGNETIC SEXTUPOLE SYSTEM FOR CORRECTION OF SPHERICAL ABERRATION
Zhou Qing, Chen Ergang, Hu Zonggao
CHINESE JOURNAL OF COMPUTATIONAL PHYSICS
1997, 14 (S1):
485-486.
The spherical aberration of electron lens is always the principal factor which limits the resolution of electron microscope.An analysis and computation of magretic sextupole corrector to correct spherical aberration in a round lens is presented.The numerical results show that resolution of electron microscope can be improved by using the present system.
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