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MONTE CARLO SIMULATION OF THE PRINCIPLE OF A NEW SCANNING ELECTRON MICROSCOPE
JIANG Chang-zhong, LI Cheng-bin
CHINESE JOURNAL OF COMPUTATIONAL PHYSICS
2001, 18 (5):
470-472.
According to the principle of a new scanning electron microscope and the mechanism of the interaction between electron beam and solid target,the trajectories of an incident electron in a sample are simulated,a simulation program is compiled using the Monte Carlo method,and the backscattering coefficients corresponding to different parameters of the SEM are obtained.
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