The Boltzmann equation is applied for the CO₂ lasers excited by high frequency switching power,it has been solved numerically using cross-section-data available in the literature.The influences of frequency on the electron energy distributions and transport coefficients are also studied.

The coupling losses in planar waveguide resonators have been calculated and some results of the coupling losses for the EH₁₁ mode of different planar waveguide are given as a function of mirror curvature and position. It is shown that there exist two special geometries to provide low coupling losses.

The optical field distribution in wide planar-waveguide CO₂ gas laser satisfies Helmholtz equation.Under certain given conditions,expressions of the polarized modes EH_nm^x and EH_nm^y are obtained by solving optical field distribution equation.The present computation gives a normalized theoretical distribution curve of EH_1.16 polarized mode existed in 3×18mm² waveguide discharge area.The curve is consistent with the experimental results.

The influence of the glow discharge total current density J and the gas pressure P on the secondary electron emission coefficient γ is studied by using the Runge-Kutta method. The variations of γ wity J, P and E/P (E is the electric field at the cathode) are obtained.