Journals
  Publication Years
  Keywords
Search within results Open Search
Please wait a minute...
For Selected: Toggle Thumbnails
Dynamics Modeling of Charged Defects in Si under B Ion Implantation
Pengdi LI, Jun LIU, Qirong ZHENG, Chuanguo ZHANG, Yonggang LI, Yongsheng ZHANG, Gaofeng ZHAO, Zhi ZENG
Chinese Journal of Computational Physics    2021, 38 (3): 361-370.   DOI: 10.19596/j.cnki.1001-246x.8245
Abstract380)   HTML898)    PDF (2331KB)(1387)      

To describe accurately the dynamic physical process and obtain quantitatively boron (B) spatial distribution as well as it's evolution behaviors in silicon (Si) under boron implantation, we built a multiscale dynamic model of charged defects. In the model, multiple microscopic processes of defects generation and evolution are comprehensively considered under B ion implantation, including charge states of defects and reactions among charged defects, evolution of B-interstitial clusters (BICs) and interactions between charged defects and carriers. The simulated B distribution is consistent with experiments. It shows that BICs dominate the depth distribution of B concentration and interstitial B (BI) makes B distribution extend into depth. Besides, considering charge states of defects, we correct diffusion coefficients of Si interstitials (I) and BI so that the behavior of B distribution can be described accurately. The model reveals real physical processes and micro-mechanisms in Si under B implantation, which demonstrates that BICs and real charge states of defects are the key in describing B distribution. It provides theoretical guidance for semiconductor device fabrication.

Table and Figures | Reference | Related Articles | Metrics