Using Monte Carlo method, both emission and spatial distributions of the backscattered electrons (BSEs) of the solids Al,Cu,Ag,Au under the action of low energy electrons with energy E₀ ≤ 5keV keV have been simulated and calculated. Mott cross section and the modified Bethe equation are used to describe the elastic and inelastic scattering of electrons in solids, respectively. The energy distribution, surface spatial distribution, depth distributioin in solids and angle distribution of BSEs have been obtained. The dependence of angle distribution of BSEs on the energy distribution, surface spatial distribution and depth distribution of BSEs are also calculated, describing the distribution regularity and emission of BSEs systematically.

Using Monte Carlo method of low energy electron scattering in polybasic medium based on the mean cross section,the scattering process of the low energy electron in the range of E₀≤5 keV has been numerically simulated.A series of the results,such as the backscattering coefficients,the energy spectrum and angular distribution of backscattered electrons,the interaction range of both primary and backscattered electrons in medium,energy dissipation distribution,have been obtained and compared with those calculated by the method of determining scattering center.The calculated results by both methods are in excellent agreement widely,showing the effectiveness and reliability of the method based on mean cross section.Also,the calculated results on the angular distributions of backscattered electrons seem not to follow a cosine law for both the lower energies as well as the medium with larger mean atomic number.