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SPUTTERING YIELD CALCULATION BY MONTE CARLO SIMULATION WITH SCREENING LENGTH OF SHELL EFFECTS
LI Zhi-jie, WANG Ze-hui, Takaichi Kawamura, Yasunori Yamamura
CHINESE JOURNAL OF COMPUTATIONAL PHYSICS
2002, 19 (4):
290-292.
The sputtering yields due to various ion impacts on monatomic materials are calculated with the ACAT code.As the interatomic potential,Moliére potential is used in the simulation,and the theoretical screenging length is adopted which was advanced by Yamamura to include shell effects.The calculation results are consistent with experiment data and Yamamura's empirical sputtering formula.
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