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RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF* EXCIMER SYSTEM PUMPED BY PROTON-BEAM
Wang Xiaosha, Chen Dongquan, Wang Zhengyan
CHINESE JOURNAL OF COMPUTATIONAL PHYSICS
1992, 9 (3):
263-266.
The computational program of chemical kinetics of KrF* excimer laser pumped by e-beam is modified. The kinetics and energy deposition for the mixture system of Ar, Kr and F2 pumped by proton-beam is calculated. The results show that deposited energy is about 50 times as much as by e-beam-pumping for the same pressure, the same mixture of the gases and the same current density.
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