A fast simulation annealing (SA) algorithm for the design of diffractive optical elements (DOE) for uniform illumination is presented.The Tsallis statistic and corresponding utility function are introduced into a hybrid algorithm in which the self-iterative and SA algorithms are combined to enhance the efficiency.Compared with traditional SA algorithm,simulated results show that it saves 99% of time to converge the incident energy into a desired region with the same mean square error (MSE).