A fast simulation annealing (SA) algorithm for the design of diffractive optical elements (DOE) for uniform illumination is presented.The Tsallis statistic and corresponding utility function are introduced into a hybrid algorithm in which the self-iterative and SA algorithms are combined to enhance the efficiency.Compared with traditional SA algorithm,simulated results show that it saves 99% of time to converge the incident energy into a desired region with the same mean square error (MSE).

Numerical Hankel transform for circularly symmetric system at variable sampling intervals in input and optput planes is presented. An improved hybrid algorithm by using quasi Gradient Decent algorithm and spectrum selectivity is applied to the design of pure phase elements (PPE) in uniform illumination. Considering heat conductivity the simulated result shows that 97.2% of the incident beam energy is homogeneously concentrated into the desired focal spot in the target plane, and it fits to the required profile with the top profile error 1.1%.