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中文
INFLUENCE OF SURFACE TRENCH ON UNIFORMITY OF PLASMA IMMERSION ION IMPLANTATION
ZENG Zhao-ming, TANG Bao-yin, WANG Song-yan, TIAN Xiu-bo, LIU Ai-guo, WANG Xiao-feng, CHU Paul K
CHINESE JOURNAL OF COMPUTATIONAL PHYSICS . 2000, (
4
): 449 -454 .
