微结构X射线源中电子与阳极作用的蒙特卡罗模拟

doi:10.19596/j.cnki.1001-246x.7586

计算物理 ›› 2018, Vol. 35 ›› Issue (1): 95-102.DOI: 10.19596/j.cnki.1001-246x.7586

微结构X射线源中电子与阳极作用的蒙特卡罗模拟

徐小东, 周彬, 郭金川, 易明皓, 肖飞虎

深圳大学光电工程学院, 光电子器件与系统(教育部、广东省)重点实验室, 深圳 518060

收稿日期:2016-11-17 修回日期:2017-03-06 出版日期:2018-01-25 发布日期:2018-01-25
通讯作者: 郭金川(1964-),男(汉),河南浚县,教授,博士,主要研究X射线相衬成像和大面积硅基微制作技术等,E-mail:jcguo@szu.edu.cn
作者简介:徐小东(1991-),男(汉),湖北黄冈,硕士,主要研究微结构X射线源等,E-mail:1014355868@qq.com
基金资助:
国家自然科学基金（11674232，11074172，10774102）资助项目

Monte Carlo Simulation of Interaction of Electrons with Anode in Microstructure X-Ray Tubes

XU Xiaodong, ZHOU Bin, GUO Jinchuan, YI Minghao, XIAO Feihu

Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China

Received:2016-11-17 Revised:2017-03-06 Online:2018-01-25 Published:2018-01-25

摘要/Abstract

摘要： 根据电子多重散射理论，基于蒙特卡罗方法研究不同能量电子垂直入射不同材料的阳极靶后，电子在阳极靶内的沉积能量分布，及X射线发射位置的能量分布.结果表明：电子在靶内的轨迹扩展和入射电子能量、靶材料有关，99%电子能量沉积在近似圆柱形区域内.且电子在入射方向上的沉积能量分布不是直接递减，而是先递增到一定深度后再递减，符合电子背散射理论.说明X射线产生区域是在距表面一定深度区域内.另外，通过对比分析发现金刚石膜作为电子吸收光栅是不可行的，但作为热沉材料有很大的潜力.这些结论可为微结构X射线源研究及高亮度高相干X射线源设计提供参考.

关键词: 微结构X射线源, 电子轨迹, 蒙特卡罗方法, 多重散射理论

Abstract: With multiple scattering theory of electrons we studied energy deposition of electrons within target and energy distribution on spot of X-ray production by Monte Carlo method as energetic electrons impinge into target vertically. It shows that spread of electrons within target is relevant to incident electron energy and target material. And 99% electron energy is deposited in a cylindrical zone. Energy deposition of electrons along incident direction increased with depth first, and then to a certain depth it decreased rapidly, which is in accordance with electron backscattering theory. These results illustrate that X-ray production zone is within a certain depth under target surface. In addition, simulation results of diamond indicate that diamond film is not recommended as an electron absorption grating, but as an excellent heat sink of target. It can be used as reference for design of microstructure X-ray tubes.

Key words: microstructure X-ray tube, electron trajectory, Monte Carlo method, multiple scattering theory

中图分类号:

徐小东, 周彬, 郭金川, 易明皓, 肖飞虎. 微结构X射线源中电子与阳极作用的蒙特卡罗模拟[J]. 计算物理, 2018, 35(1): 95-102.

XU Xiaodong, ZHOU Bin, GUO Jinchuan, YI Minghao, XIAO Feihu. Monte Carlo Simulation of Interaction of Electrons with Anode in Microstructure X-Ray Tubes[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2018, 35(1): 95-102.

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微结构X射线源中电子与阳极作用的蒙特卡罗模拟

Monte Carlo Simulation of Interaction of Electrons with Anode in Microstructure X-Ray Tubes

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