计算物理 ›› 1998, Vol. 15 ›› Issue (2): 177-183.

• 论文 • 上一篇    下一篇

利用概率分布计算电子束聚焦状态

雷威   

  1. 东南大学电子工程系, 南京 210096
  • 收稿日期:1996-10-14 修回日期:1996-10-14 出版日期:1998-03-25 发布日期:1998-03-25
  • 作者简介:雷威,男,30,副教授,博士,东南大学电子工程系

ANALYSE THE FOCUS OF ELECTRON BEAM FROM PROBABILITY FUNCTION

Lei Wei   

  1. Department of Electronic Engineering, Southeast University, Nanjing 210096
  • Received:1996-10-14 Revised:1996-10-14 Online:1998-03-25 Published:1998-03-25

摘要: 世界各国的学者对电子束的聚焦性能已经做了广泛的研究,提出了许多分析电子束聚焦性能的方法,在这些方法的基础上,试图利用概率分布函数来描述电子束的聚焦过程。该方法将电子的发射看做是随机过程,并从轨迹的落点的概率分析了电子束的形状和大小,避免了杂散小峰的影响。

关键词: 电子束聚焦, 光学参量法, 实际轨迹法, 概率分布函数, 随机过程

Abstract: Many scientists have already studied the focus of electron beam, and proposed several ways to analyse the electron beam, such as eikonal method, trajectories way, etc. Based on these,the paper uses the probability function to analyse the focus of electron beam, and treats the emission of electron as a random process. The focus has been attained from the probability of coordinates of trajectories.

Key words: focus of electron beam, eikonal method, trajectory method, probability function, random process

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