计算物理 ›› 1997, Vol. 14 ›› Issue (S1): 724-724.
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摘要： 分子束外延(MBE)过程中杂质扩散系数的确定,可以归结为动边界杂质扩散问题的反问题#br#ut=Duxx x>v(t0-t), t0>0, t>0 (1)#br#u(x,0)=n0 x>vt0, n0=Const.(2)#br#u(v(t0-t),t)=N0 t>0,N0=Const.(3)#br#u(x,t0)=N(x) x>0(4)#br#我们采用粒子数守恒定律精确地确定样品的生长速率;利用有限差分法计算杂质的扩散系数。对于GaAs中掺Be样品的计算结果表明:该方法可以简化传统的工序;确定生长速率的方法较振荡法精确;提高了扩散系数的计算精度。
