质子束泵浦KrF*准分子系统化学动力学研究和能量沉积计算

计算物理 ›› 1992, Vol. 9 ›› Issue (3): 263-266.

质子束泵浦KrF^*准分子系统化学动力学研究和能量沉积计算

王晓莎, 陈栋泉, 王正言

北京应用物理与计算数学研究所, 100088

收稿日期:1991-07-11 修回日期:1992-03-19 出版日期:1992-09-25 发布日期:1992-09-25

RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF^* EXCIMER SYSTEM PUMPED BY PROTON-BEAM

Wang Xiaosha, Chen Dongquan, Wang Zhengyan

Institute of Applied Physics and Computational Mathematics, P. O. Box 8009, Beijing, 100088, China

Received:1991-07-11 Revised:1992-03-19 Online:1992-09-25 Published:1992-09-25

摘要/Abstract

摘要： 本文修改了电子束泵浦下KrF^*准分子激光的化学动力学程序,利用修改后的程序对质子束泵浦下的Ar、Kr、F₂混合系统的化学动力学过程和能量沉积情况作了计算。计算结果表明,在相同混合气体成份,气压以及电流密度情况下,质子束能量沉积是电子束能量沉积的50倍左右。

关键词: KrF^*准分子激光, 质子束泵浦, 能量沉积

Abstract: The computational program of chemical kinetics of KrF^* excimer laser pumped by e-beam is modified. The kinetics and energy deposition for the mixture system of Ar, Kr and F₂ pumped by proton-beam is calculated. The results show that deposited energy is about 50 times as much as by e-beam-pumping for the same pressure, the same mixture of the gases and the same current density.

Key words: KrF^* excimer laser, proton-beam-pumping, energy deposition

王晓莎, 陈栋泉, 王正言. 质子束泵浦KrF^*准分子系统化学动力学研究和能量沉积计算[J]. 计算物理, 1992, 9(3): 263-266.

Wang Xiaosha, Chen Dongquan, Wang Zhengyan. RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF^* EXCIMER SYSTEM PUMPED BY PROTON-BEAM[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1992, 9(3): 263-266.

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