低压直流氩放电中电子的能量分布

计算物理 ›› 1990, Vol. 7 ›› Issue (4): 448-452.

低压直流氩放电中电子的能量分布

王德真, 刘悦, 马腾才

大连理工大学三束材料改性国家重点实验室 116024

收稿日期:1990-04-22 出版日期:1990-12-25 发布日期:1990-12-25

ELECTRON ENERGY DISTRIBUTIONS OF DIRECT-CURRENT ARGON DISCHARGES AT LOW PRESSURES

Wang Dezhen, Liu Yue, Ma Tengcai

The Key National Laboratory of Material Modification byBeam Three, Dalian University of Technology

Received:1990-04-22 Online:1990-12-25 Published:1990-12-25

摘要/Abstract

摘要： 由数值求解均匀的玻尔兹曼方程,计算出低压直流氩放电中电子的能量分布。计算适合于从低电子密度到高电子密度的广大区域,电场强度与气体密度比值在范围10^-16 < E/N < 10^-15。研究了各种电离度下电子的能量分布及电场对能量分布的影响。

关键词: 直流氩放电, 电子能量分布, 破尔兹曼方程

Abstract: Electron energy distributions of direct-curent argon discharges at low pressures were calculated by numerically solving the homogeneous Baltzmann equation. The calculations cover the whole range of low electron densities to sufficiently high electron densities. Typical values of the ratios of the electric field to the gas density in this work are in the renges of 10^-16 < E/N < 10^-15 Vcm². The influence of electron-electron collisions and the electric field on the electron energy distribution function was studied.

Key words: direct-current argon discharge, electron energy distribution, baltzmann equation

王德真, 刘悦, 马腾才. 低压直流氩放电中电子的能量分布[J]. 计算物理, 1990, 7(4): 448-452.

Wang Dezhen, Liu Yue, Ma Tengcai. ELECTRON ENERGY DISTRIBUTIONS OF DIRECT-CURRENT ARGON DISCHARGES AT LOW PRESSURES[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1990, 7(4): 448-452.

[1]	吕少波, 蔺增, 王庆, 巴德纯. 射频辉光放电CH₄等离子体中电子的能量分布[J]. 计算物理, 2011, 28(2): 250-258.
[2]	王新兵, 徐启阳, 刘儿兀, 谢明杰, 李再光. 高频放电CO₂激光器电子能量分布及输运系数[J]. 计算物理, 1997, 14(S1): 527-529.