关键词: 玻尔兹曼方程, 射频电场, 甲烷等离子体, 电子能量分布

Abstract: Electron energy distribution function(EEDF) in RF methane plasma is calculated with Boltzmann equation and Lorentz approximation. Instead of a self-consistent RF field satisfying Poisson's equation,a simple electric field distribution is used.6 neutrals are included,as well as 27 electron-neutral reactions.EEDF yields information about electron reaction rates in plasma,electron average energy,and transport coefficients.In the sheath region,EEDF is Maxwellian,and in the bulk region a Druyvesteyn EEDF is found.An electron average energy peak occurs in the sheath region,together with electron reaction rates.Differing from constant transport coefficients used in references,electron diffusion and mobility coefficients strongly depend on RF period and space.

Key words: Boltzmann equation, radio-frequency electric field, methane plasma, electron energy distribution