Abstract: Optical wave transmission through slightly rough surface of three layered medium is studied. Transmission coefficients with different polarization are derived using a small perturbation method. A Gaussian rough surface is used to describe rough surface of layered medium. Influence of permittivity of layered medium, mean layer thickness of intermediate medium, roughness surface parameters and incident wavelength on the transmission coefficient of HH polarization is diacussed.

Key words: optical wave transmission, small perturbation method, transmission coefficient, Gaussian rough surface, layered medium