CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 1984, Vol. 1 ›› Issue (1): 114-117.

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MONTE CARLO METHOD ON SIMULTANEOUSLY MEASURING COMPOSITION AND THICKNESS OF FILMS IN MICRO-DOMAIN

HE YAN-CAI   

  1. Shanghai Institute of Ceramics, Academia Sinica
  • Received:1984-02-23 Online:1984-06-24 Published:1984-06-24

Abstract: The method proposed in reference[3] has been developed to e-nable measurement of compositions and thicknesses of films in micro-domain at the same time by Monte Carlo simulation.