CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 1987, Vol. 4 ›› Issue (3): 380-384.

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A CALCULATION PROGRAM OF DETERMINING THICKNESSES OF THIN FILMS ON SUBSTRATES BY MONTE CARLO SIMULATION

He Yan-cai, Huang Yue-hong, Ha Min   

  1. Shanghai Institute of Ceramics, Academia Sinica
  • Received:1986-11-16 Online:1987-09-25 Published:1987-09-25

Abstract: On the basis of author's theories and calculation method[1,2,3],we made a evaluation program of determining thicknesses of thin films on substrates.The software can be conveniently operated,and have already been extensively applied to the calculations for determining thicknesses of avariety of film materials.