CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 1989, Vol. 6 ›› Issue (1): 19-26.
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He Yancai1, Chen Jiaguang2
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Abstract: The theories and the calculation methods methods of electron scattering with keV and below keV energy by Monte Carlo simulation are discussed in this paper and the applications in the important fields i.e. electron microscopy and electron beam lithography are introduced.
He Yancai, Chen Jiaguang. THEORIES AND CALCULATION METHODS OF ELECTRON (KEV AND BELOW KEV)SCATTERING IN SOLIDS AND RELATED APPLICATIONS[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1989, 6(1): 19-26.
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http://www.cjcp.org.cn/EN/Y1989/V6/I1/19
