Abstract: This paper simulates desorption phenomenon of atom-state chemisorbed gas on solid suface by low-energy ions bombardment based on collision theory of winters sigmund. In the simulation, line relevance between induced gas atom gields Y by ions and coverge density θ of gas atom on solid suface is obtained, on the basis of line relevance, ion induction desorption cross section σ is obtained rapidly.

Key words: chemisorb, desorption cross section, simulation