Abstract: The electron transport process in cathode sheath of helium dc glow discharge is studied by using Monte Carlo simulation. The electron is accelerated between collisions by. the non-uniform electric field. The electron free flying time between collisions is determined by electron-neutral collision frequency. The proposed method may reduce complicated calculation and save much computer time. The experimental data of collision cross section are fitted with semi-experience expressions. The electron mean energy, the energy spatial distribution, and other parameters distribution are studied as well.

Key words: glow discharge, cathode sheath, Monte carlo, electron transport