Abstract: Based on the privious paper (1) and using the Mott cross-section by solving relativistic Dirac equation for elastic scattering, Monte Carlo simulation of low energy electron scattering in Al bulk target and film have been performed. The calculated backscattering coefficients, the energy distribution of backscattered electrons and electron transmission coefficients are in good agreement with experimental results. The spatial distribution of low-loss backscattered electrons is also calculated and exhibits a high resolution.

Key words: low energy electron scattering, monte carlo simulation, Backscattered electron