SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SOLIDS BY MONTE CARLO SIMULATION

CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 1995, Vol. 12 ›› Issue (4): 561-564.

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SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SOLIDS BY MONTE CARLO SIMULATION

Tan Zhenyu¹, He Yancai²

1. Electric Power Dept, Shandong Polytechnic University, Jinan 250014;
2. Shanghai Institute of Ceramics, Academia Sinica, Shanghai 200050

Received:1993-08-30 Revised:1994-08-08 Online:1995-12-25 Published:1995-12-25

Abstract

Abstract: The spatial distribution of backscattered electron in solids have been calculated by Monte Carlo method, based on Mott cross-section for elastic scattering as well as Streitwolf,Quirm and Gryzinski's cross-section for inelastic scattering. Some regularities have been acquired from a large amount of calculations, providing a certain basis for the quantitative research of low-energy electron microscopy.

Key words: Monte Carlo method, backscattered electron, spatial distribution

CLC Number:

O562.5

Tan Zhenyu, He Yancai. SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SOLIDS BY MONTE CARLO SIMULATION[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1995, 12(4): 561-564.

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SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SOLIDS BY MONTE CARLO SIMULATION

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