Abstract: A computer program is developed for simulation of μ-PIXE spectra for multi-layer and inhomogeneous thick target analysis. The program can allow users to define three dimensions multi-layer and inhomogeneous target in terms of slices and inclusions. Computations of 2D maps and line scan distribution have been performed on a target consisting of a spherical Fe inclusion embedded in a Si block. The Cu mesh is also used to test the program. The line scan result agress well with that obtained from experiment

Key words: Multi-layer, Inhomogeous, Thick target, μ-PIXE, Simulation