Abstract: The Monte Carlo method is used in the single event simulation which describes the processes of the particle transportation and the random sampling. Particularly, the single event upset of a silicon chip induced by 14*!MeV neutrons at a random incident angle is calculated and analyzed. In the mean time, the Monte Carlo error is also considered. By the Monte Carlo method, some information about the physical mechanism of the single event upset is provided.

Key words: Monte Carlo simulation, single event upset, calculating simulation