An Adaptive Hybrid Inversion Algorithm for Ellipsometric Measurement of Thin Films

CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 2007, Vol. 24 ›› Issue (5): 619-624.

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An Adaptive Hybrid Inversion Algorithm for Ellipsometric Measurement of Thin Films

JING Xili¹, XU Tianfu¹, CHEN Xiujuan², LI Dongyu¹

1. College of Sciences, Yanshan University, Qinhuangdao 066004, China;
2. Daqing Geophysical Institute, Daqing 163357, China

Received:2006-06-02 Revised:2006-10-30 Online:2007-09-25 Published:2007-09-25

Abstract

Abstract: A hybrid optimization algorithm is developed for solving ellipsometric measurement problem.This algorithm is based on the high ability of simulated annealing method in seeking optimum solution and the high computation efficiency of simple shape method.It seeks the global minimum solution of objective function and gets proper parameters of optical model.The computation efficiency is higher than that of simulated annealing algorithm.The selection of inversion controlling parameters is discussed to make this algorithm adaptive.

Key words: ellipsometry, simulated annealing, thin film

CLC Number:

JING Xili, XU Tianfu, CHEN Xiujuan, LI Dongyu. An Adaptive Hybrid Inversion Algorithm for Ellipsometric Measurement of Thin Films[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 2007, 24(5): 619-624.

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An Adaptive Hybrid Inversion Algorithm for Ellipsometric Measurement of Thin Films

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