Abstract: A new algorithm-particle swarm optimization (PSO), based on swarm intelligence, is applied to data processing of film parameters by ellipsometry. For a monolayer absorption film, reflective index, extinction coefficient and film thickness are obtained simultaneously by PSO. Even if the range of parameters is unknown, optimal solution can be obtained rapidly with search in a wide range. Compared with ellipsometry processing and genetic algorithm, the method exhibits high computational precision and high convergence speed.

Key words: particle swarm optimization, ellipsometry, optical film