Abstract: Backscattering coefficients of low energy electron beams(from 100 eV to(10 000) eV) impinging on solids(Au,Si and Al) are simulated with detailed Monte Carlo code in which all interaction experienced by single electron are simulated in chronological succession.Mott cross-section and atomic generalized-oscillator-strength model within Born approximation are used to calculate elastic and inelastic scatterings in solid,respectively.Compared with various Monte Carlo codes it is concluded that detailed Monte Carlo code provided better agreement with experimental results at electron energies less than 10 keV.

Key words: low energy electrons, backscattering coefficient, detailed Monte Carlo simulation, condensed-history Monte Carlo simulation