Abstract: To get element quantity of a sample in neutron depth profiling,method of standard sample's general ions quantity in measurement scope is used to relative quantity analysis technology. The least square method is used. According to actual experiment condition and on the base of energy width modification and depth distribution unfolding analysis,formula of quantitative analysis is deduced and programmed with FORTRAN. Experiment simulation is used to quantify10B element of a sample to validate feasibility of the method. It shows that quantifying element of a sample by comparing with normal sample is feasible.

Key words: neutron depth profiling, relative quantity analysis, least square method