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A Monte Carlo Simulation of Penetration Depth and Concentration Distribution for 200keV Vanadium Ions Implanted into Peanuts
WANG Lin-xiang, ZHU Heng-jiang, ZHANG Shi-feng, WANG Shi-heng
CHINESE JOURNAL OF COMPUTATIONAL PHYSICS
2006, 23 (6):
743-747.
In one- and two- dimensional approximations,the penetration depth-concentration distribution for 200 keV vanadium ions implanted into peanuts is simulated using a Monte Carlo method.The calculation is in good agreement with experimental results.The depth-concentration distribution for nitrogen ions with low energy implanted into peanuts is calculated which can not be obtained with experiment.It provides a computational method for the depth-concentration distribution of ions with low energy implanted into seeds.
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